By Dr. Sabina Kuprėnaitė Deep-ultraviolet optics used in semiconductor lithography may be exposed to billions of pulses over their service life. That creates a qualification challenge that initial reflectance specifications or laser-induced damage thresholds alone cannot answer. A mirror may meet its optical specification… Read More The post Five Billion Pulses Later: What DUV Optics Testing Reveals About Semiconductor Tool Uptime appeared first on SemiWiki.
Source: https://semiwiki.com/lithography/372789 ... ol-uptime/