Sweden-based AlixLabs AB (which was spun off from Lund University in 2019) has used its Atomic Layer Etching (ALE) Pitch Splitting technology (APS) technology to etch structures corresponding to commercial 3nm semiconductor processes on test silicon provided by Intel. The results will be shared in full by chief technology officer & co-founder Dmitry Suyatin at the SPIE Advanced Lithography + Patterning trade show in San Jose, CA, USA (23–27 February)...
Source: https://www.semiconductor-today.com/new ... 0225.shtml