Atomic layer deposition (ALD) equipment provider and materials science company Forge Nano Inc of Thornton, CO, USA has further expanded into the semiconductor market by unveiling its new TEPHRA single-wafer ALD cluster platform. By offering single-wafer ALD coating quality at throughputs similar to the speed of batch systems, TEPHRA enables the production of what are claimed to be best-in-class coatings at commercial scale with unrivaled precursor efficiency and speed...
Source: https://www.semiconductor-today.com/new ... 0724.shtml