AlixLabs AB of Lund, Sweden — which was spun off from Lund University in 2019 and has developed the Atomic Layer Etching (ALE) Pitch Splitting technology (APS) — is participating at SEMICON Japan 2024 at Tokyo Big Sight (11–13 December), marking the public debut for its 300mm wafer process chamber. Its Made in Sweden APS (ALE Pitch Splitting) tools are aimed at allowing the semiconductor industry to scale down to sub-7nm manufacturing processes in a more sustainable way, and is positioned as an alternative to costly double patterning or EUV (extreme ultraviolet) solutions...
Source: https://www.semiconductor-today.com/new ... 1124.shtml