The Centre for Integrated Semiconductor Materials (CISM) at Swansea University in South Wales has used a newly commissioned AIXTRON close-coupled showerhead (CCS) deposition system to establish the first capability in the UK for growing gallium oxide (Ga2O3) thin films on 4-inch substrates, which have been tested and shown to be very uniform and of extremely high quality, it is claimed...
Source: https://www.semiconductor-today.com/new ... 0325.shtml