SCT SUSS MicroTec launches 300mm imprint platform
Posted: Thu Nov 17, 2022 11:34 am
SÜSS MicroTec SE of Garching, near Munich, Germany (which makes photomask aligners, laser processing systems and wafer bonders) has extended its imprint technology to 300mm wafers and launched its new mask aligner MA12 Gen3 at the SEMICON Europa 2022 show in Munich. The addition to the product portfolio combines photolithography, micro- to nano-imprint, and wafer-level stacking within a compact tool...
Source: https://www.semiconductor-today.com/new ... 1122.shtml
Source: https://www.semiconductor-today.com/new ... 1122.shtml