Ion implantation system maker Axcelis Technologies Inc of Beverly, MA, USA has shipped a Purion EXE SiC high-energy implanter as well as a successful Purion H200 SiC medium-energy implanter evaluation closure at power device chipmakers in Japan. The systems will be used for 150mm and 200mm production of silicon carbide power devices supporting automotive, industrial, energy and other power-intensive applications...
Source: https://www.semiconductor-today.com/new ... 0424.shtml