SCT LayTec adds fully automated wafer handling and cassette-to-cassette loading to EpiX mapping station

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SCT LayTec adds fully automated wafer handling and cassette-to-cassette loading to EpiX mapping station

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After introducing its EpiX mapping station some years ago, in-situ metrology system maker LayTec AG of Berlin, Germany is now bringing its newest EpiX generation to the market. The first demonstration unit of the new system is being displayed in the firm’s booth at the 20th International Conference on Metal Organic Vapor Phase Epitaxy (ICMOVPE XX) in Stuttgart, Germany (10-14 July)...

Source: http://www.semiconductor-today.com/news ... 0722.shtml
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