Eulitha AG of Kirchdorf, Switzerland (which provides lithography equipment and services for the nanotechnology, photonics and optoelectronic markets) says that several Asian vertical-cavity surface-emitting laser (VCSEL) foundries have adopted its deep ultraviolet (DUV) patterning platform for 6-inch wafer production. Eulitha recently shipped multiple systems to support the rapidly growing demand for VCSELs used in applications ranging from LiDAR, 3D sensing, data centers, and next-generation optical communications...
Source: https://www.semiconductor-today.com/new ... 0925.shtml